Omron Electronics D6F Series MEMS Flow Sensors
Omron Electronics D6F MEMS Flow Sensors and Velocity Sensors are compact, highly reliable sensors with a unique cyclone flow structure that diverts particulate from the sensor element. As an alternative to differential pressure sensing or for detecting clogged filters, the D6F series is available in PCB-mounted, flange-mount, and connector models. The D6F-P 0.1 LPM version MEMS Flow Sensor is targeted at ultra low-flow applications and measures up to 200 LPM with a bypass set-up.
D6F MEMS (Micro Electro Mechanical System) Flow Sensors includes intelligent, compact models capable of measuring flow velocity and mass flow rate movement with highly repeatable accuracy. Mass flow rates from 1 LPM to 50 LPM (Liters per Minute) and high sensitivity are achieved with the MEMS Flow Chip.
Features
- Small size due to MEMS technology
- Flow sensors can be used with most medical, inert welding, and combustion gases
- Excellent repeatability and accuracy
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